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Photolithography

Photolithography, a patterning process
With the help of lithography machines light sensitive polymers or photoresists are exposed by UV light source and developed with chemical means to form 3D relief images or objects on carrying substrate

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Overview

Photolithography, a patterning processWith the help of lithography machines light sensitive polymers or photoresists are exposed by UV light source and developed with chemical means to form 3D relief images or objects on carrying substrate

Process

  • The lithography process involving DaLI is achieved by selective exposure of photoresist using guided laser beam. No photomask lithography is required.
  • Photolithography process is widely used in semiconductor and printed circuit board production industry, but it can be applied in other fields, such as MEMS, lab on a chip, microfluidics, photomask production, quantum devices, micro optics.
  • In these fields the design of a new device is often iterative, that is why the maskless photolithography process proves useful, offering rapid product development in-house at no cost and waiting for new and expensive versions of photolithography masks.

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