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TS150

MPI TS150 is a 150 mm Manual Probe System for accurate and reliable DC/CV, RF and High Power measurements.

Overview

MPI TS150 is a 150 mm Manual Probe System for accurate and reliable DC/CV, RF and High Power measurements.

Universal Use

Designed for wide variety of applications such as Device Characterization and Modeling, Wafer Level Reliability, Failure Analysis, IC Engineering, MEMS and High Power.

Ergonomic Design

Unique puck controlled air bearing stage for quick single-handed operation.
Rigid platen accommodates up to 10 DC or 4 RF positioners.
Highly repeatable platen lift design with three discrete positions for contact, separation, and loading.

Upgradability

Available with various chuck options and wide range of accessories such as DC/RF/mmW MicroPositioners, Optics, microscopes and EMI shielded dark box to support various application requirements.

Chuck XY Stage (Standard)
Total travel range	180 x 230 mm (7.1 x 9.1 in)
Fine-travel range	25 x 25 mm fine micrometer control
Fine-travel resolution	< 1.0 μm (0.04 mils) @ 500 μm/rev
Planarity	< 10 μm
Theta travel (standard)	360°
Theta travel (fine)	± 5.0°
Theta resolution	7.5 x 10^-3 gradient
Movement	Puck controlled air bearing stage
Optional XY Stage for TS150-ES
Planarity	< 10 μm (0.4 mils)
Theta travel (standard)	Free movement up to 360°
Movement	Easy puck controlled air bearing stage for TS150-ES
Fine adjustment	N/A
Manual Microscope Stage (Air Bearing)
Movement range	25 x 25 mm (1 x 1 in)
Resolution	N/A
Scope lift	Manual, tilt-back
Movement	Air bearing control, fixed by vacuum
Manual Microscope Stage (Linear)
Movement range	50 x 50 mm (2 x 2 in)
Resolution	<5 μm (0.2 mils)
Scope lift	Manual, tilt-back or vertical (depending on microscope type)
Movement	Independently controlled X and Y movement with locking screws

Our friendly team is here to help.

info@trokutsolutions.com

Our friendly team is here to help.

(+91) (022) 40124404