Overview
MPI TS2000 Series is a 200 mm Automated Probe System for reliable DC, RF and High Power Production Test Measurements.
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TS2000 Series
MPI TS2000 Series is a 200 mm Automated Probe System for reliable DC, RF and High Power Production Test Measurements.
Key Features
Designed for wide variety of On-Wafer Production Applications
- DC-IV / DC-CV / Pulsed-IV applications.
- RF applications up to 67 GHz & 4-port setup.
- High Power production application up to 10 kV / 600 A.
- IC Design validation from ambient to 300 °C.
Production Reliability
- Designed for 24/7 production reliability.
- Integrated passive vibration isolation table.
- Optional active vibration isolation base.
- Ready for temperature ambient to 300 °C.
Ergonomic Design and Options
- Designed with easy single wafer front loading.
- Large Probe Platen supporting up to 12x DC or 4x DC + 4x RF MicroPositioners or standard 4.5” probe card holder.
- Available with various chuck options and wide range of accessories such as 4.5″ probe card adaptor, DC/RF MicroPositioners, microscopes to support various application requirements.
Specification
| Chuck XY Stage (Programmable) | |
|---|---|
| Travel range | 210 mm x 340 mm (8.3 x 13.4 in) |
| Resolution | 0.1 µm |
| Accuracy | < 4.0 µm |
| Repeatability | < 1.0 µm |
| XY stage drive | Closed-loop high precision servo motor PID control |
| Speed | 5-Speed XY chuck stage speed movement |
| Max. movement speed | 100 mm/sec |
| Chuck Z Stage | |
| Travel range | 10 mm (0.4 in) |
| Resolution | 0.2 µm |
| Accuracy | < 2.0 µm |
| Repeatability | < 1.0 µm |
| Z stage drive | Closed-loop high precision servo motor PID control |
| Speed | 5-Speed Z chuck stage adjustable speed movement |
| Max. movement speed | 30 mm/sec |
| Chuck Theta Stage (Programmable) | |
| Travel range | ±5.0° |
| Resolution | 0.0004° |
| Accuracy | < 3.0 µm (measured at the edge of the 200 mm chuck) |
| Repeatability | < 2.0 µm |
| Theta stage drive | High resolution stepper motor with linear encoder feedback system |
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