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    SC Cube

    SC Qube Series

    • The SC Qube is an ALD batch system for R & D and small scale production to coat different kinds and sizes of 3D parts.
    • The patent-pending scalable chamber from Swiss Cluster can be configured tofit to all types of 3D parts and coating material requirements to deliver exceptional coating homogeneity at unparalleled process speeds.
    • Our single chamber approach makes it easy to configure the chamber,integrate to a cleanroom or to a glovebox unit with an easy front loading of 3D parts with custom-made holders.

    Overview

    SC Qube Series

    • The SC Qube is an ALD batch system for R & D and small scale production to coat different kinds and sizes of 3D parts.
    • The patent-pending scalable chamber from Swiss Cluster can be configured to

    fit to all types of 3D parts and coating material requirements to deliver

    exceptional coating homogeneity at unparalleled process speeds.

    • Our single chamber approach makes it easy to configure the chamber,

    integrate to a cleanroom or to a glovebox unit with an easy front loading

    of 3D parts with custom-made holders.       

    Specification

    Chamber Dimensions
    Adapted to your 3D parts and coating material 70 L – 1000 L
    Dimension Range 640x640x640 mm – 900x1600x700 mm
    Loading
    Loading Method Front loading with guided cart
    Frame Holders Custom-made frame holders for 3D parts
    Cleanroom Compatibility Cleanroom compatible
    Glovebox Compatibility Glovebox compatible
    Process Temperatures
    Temperature Range Up to 500°C
    Precursors
    Gas Sources Up to 8 gas sources with 6 individual inlets
    Ozone Option Available
    Standard Materials
    Materials Al₂O₃, ZnO, SiO₂, TiO₂, Y₂O₃, Nitrides
    Delivery System Novel bubbler delivery system optimized for low vapor pressure precursors
    Uniformity 500 nm Al₂O₃ <1% 1-sigma uniformity
    Substrate Sizes
    Substrates Multiple substrates or 3D objects of various shapes and sizes
    Adaptation Dimensions of chamber and holder are optimally adapted to the parts and coating material

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