Specification
| Specifications | |
|---|---|
| Accessible writing area | Up to 120 x 100 mm² |
| Horizontal and vertical resolution | ≤ 10 nm |
| Max. travel distance z-axis | 49 mm |
| Objectives | 40x/1.4 | 20x/0.7 | 10x/0.4 | 10x/0.3 | 5x/0.25 |
|---|---|---|---|---|---|
| Horizontal feature size | ≤ 220 nm | ≤ 420 nm | ≤ 730 nm | ≤ 980 nm | ≤ 1.2 μm |
| Vertical feature size | ≤ 550 nm | ≤ 2.9 μm | ≤ 9.2 μm | ≤ 16 μm | ≤ 23 μm |
| Field of view | Ø 0.66 mm | Ø 1 mm | Ø 2 mm | Ø 2 mm | Ø 5 mm |
| Typical writing speed | 150 mm/s | 300 mm/s | 600 mm/s | 600 mm/s | 1,200 mm/s |
| Typical throughput in galvo mode | 0.05 mm³/h | 0.25 mm³/h | 4 mm³/h | 4 mm³/h | 30 mm³/h |
| Typical throughput using adaptive resolution | 0.25 mm³/h | 2.25 mm³/h | 40 mm³/h | 40 mm³/h | 300 mm³/h |
