Overview
MPI TS150-HP is a 150 mm Manual Probe System 150 mm Manual Probe System for accurate High Power measurements up to 10 kV, 600 A.
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TS150-HP
MPI TS150-HP is a 150 mm Manual Probe System 150 mm Manual Probe System for accurate High Power measurements up to 10 kV, 600 A.
Key Features
Universal Use
- Designed specifically for high power device measurement and wide variety of applications such as Device Characterization and Modeling, Wafer Level Reliability, Failure Analysis, IC Engineering, and MEMS.
Ergonomic and Safe Design
- Unique puck controlled air bearing stage for quick single-handed operation.
- Rigid platen accommodates up to 10 high voltage or 4 high current positioners.
- EMI shielded DarkBox and platen ArcShieldTM for safe high voltage applications.
- Highly repeatable platen lift design with three discrete positions for contact, separation, and loading.
Upgradability
- Available with various instrument connection options and chuck options and wide range of accessories such as MicroPositioners and microscopes to support various application requirements.
Specification
| Chuck XY Stage (Standard) | |
|---|---|
| Total travel range | 180 x 230 mm (7.1 x 9.1 in) |
| Fine-travel range | 25 x 25 mm fine micrometer control |
| Fine-travel resolution | <1.0 µm (0.04 mils) @ 500 µm/rev |
| Planarity | <10 µm |
| Theta travel (standard) | 360° |
| Theta travel (fine) | ±5.0° |
| Theta resolution | 7.5 x 10-3 gradient |
| Movement | Puck controlled air bearing stage |
| Optional XY Stage for TS150-ES | |
| Planarity | <10 µm (0.4 mils) |
| Theta travel (standard) | Free movement up to 360° |
| Movement | Easy puck controlled air bearing stage for TS150-ES |
| Fine adjustment | N/A |
| Manual Microscope Stage (Air Bearing) | |
| Movement range | 25 x 25 mm (1 x 1 in) |
| Resolution | N/A |
| Scope lift | Manual, tilt-back |
| Movement | Air bearing control, fixed by vacuum |
| Manual Microscope Stage (Linear) | |
| Movement range | 50 x 50 mm (2 x 2 in) |
| Resolution | <5 µm (0.2 mils) |
| Scope lift | Manual, tilt-back or vertical (depending on microscope type) |
| Movement | Independently controlled X and Y movement with locking screws |
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