Overview
MPI TS200-SE is a 200 mm Manual Probe System with ShielDEnvironmentTM for accurate and reliable DC/CV, High Power, RF and mmW measurements.
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TS200-SE
MPI TS200-SE is a 200 mm Manual Probe System with ShielDEnvironmentTM for accurate and reliable DC/CV, High Power, RF and mmW measurements.
Key Features
Universal Use
- Designed for wide variety of applications such as Device Characterization, High Power and Modeling, RF and mmW Wafer Level Reliability, and Failure Analysis.
MPI ShielDEnvironment™ for Accurate Measurements
- Design for Advanced EMI / RFI / Light-Tight Shielding.
- FemtoAmp low-leakage capabilities.
- Integrated vibration isolation.
- Ready for temperature range -60 °C to 300 °C.
Ergonomic Design and Options
- Unique puck controlled air bearing stage for quick single-handed operation.
- Available with various chuck options and wide range of accessories such as DC/RF/mmW MicroPositioners, microscopes and ShielDEnviroment™ provide excellent support for various application requirements.
Specification
| Chuck XY Stage (Standard) | |
|---|---|
| Total travel range | 225 x 260 mm (8.9 x 10.2 in) |
| Fine-travel range | 25 x 25 mm fine micrometer control |
| Fine-travel resolution | <1.0 µm (0.04 mils) @ 500 µm/rev |
| Planarity | <10 µm |
| Theta travel (standard) | 360° |
| Theta travel (fine) | ±5.0° |
| Theta resolution | 7.5 x 10-3 gradient |
| Movement | Puck controlled air bearing stage |
| Chuck Z Stage | |
| Travel range | 5 mm (0.2 in) |
| Fine-travel resolution | <1.0 µm (0.04 mils) @ 500 µm/rev |
| Load stroke | 20 mm, pneumatically |
| Manual Microscope Stage (Linear) | |
| Movement range | 50 x 50 mm (2 x 2 in) |
| Resolution | < 5 µm (0.2 mils) |
| Scope lift | Manual, tilt-back or vertical (depending on microscope type) |
| Movement | Independently controlled X and Y movement with locking screws |
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