Overview
MPI TS3000-SE is a 200 mm Automated Probe System for accurate and reliable High Power measurements
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TS2000-HP
MPI TS3000-SE is a 200 mm Automated Probe System for accurate and reliable High Power measurements.
Key Features
Dedicated designed for High Voltage and High Current application
- On wafer high power device measurement up to 10kV/600A.
- Gold plated chuck surface for minimum contact resistance and vacuum holes optimized for thin wafer handling down to 50 µm.
- Taiko wafer chuck option.
- Dedicated high voltage and high current probes.
- Anti-arcing solutions.
MPI ShielDEnvironment™ for Accurate Measurements
- Designed for Advanced EMI / RFI / Light-Tight Shielding.
- fA low-leakage capabilities.
- Ready for temperature range -60 °C to 300 °C.
Ergonomic Design and Safety
- Front and advanced automated single wafer side loading capability with easy pre-alignment for automated routines.
- Regulatory approved safety interlocked light curtain to protect users.
- Integrated active vibration isolation.
- Completely integrated prober control for faster, safer and convenient system and test operation.
- The Safety Test Management (STM™) option to load/ unload wafers at any chuck temperatures and auto dew point control.
Specification
| Chuck XY Stage (Programmable) | |
|---|---|
| Travel range | 210 x 300 mm (8.27 x 11.81 in) |
| Resolution | 0.5 µm |
| Accuracy | < 2.0 µm |
| Repeatability | < 2.0 µm |
| XY stage drive | High resolution stepper motor with linear encoder feedback system |
| Speed* | 4-Speed XY chuck stage adjustable speed movement |
| Slowest | 10 µm/sec |
| Fastest | 50 mm/sec |
| Chuck Z Stage (Programmable) | |
| Travel range | 50 mm (2.0 in) |
| Resolution | 0.2 µm |
| Accuracy | < 2.0 µm |
| Repeatability | < 1.0 µm |
| Z stage drive | High resolution stepper motor with integrated pin drive system for easy wafer loading |
| Speed* | 3-Speed Z chuck stage adjustable speed movement |
| Slowest | 10 µm/sec |
| Fastest | 20 mm/sec |
| Chuck Theta Stage (Programmable) | |
| Travel range | ± 6.0° |
| Resolution | 0.0004° |
| Accuracy | < 2.0 µm (measured at the edge of the 200 mm chuck) |
| Repeatability | < 1.0 µm |
| Theta stage drive | High resolution stepper motor with linear encoder feedback system |
| Video Camera (Vertical Control Environment | |
| Sensor type | 1/1.8″ mono CCD |
| Sensor size | 7.07 mm x 5.3 mm |
| Camera pixels | 3 MP |
| Resolution | 2048 x 1536 pixels |
| Wafer Alignment | |
| Sensor type | 1/1.8″ mono CCD |
| Sensor size | 7.07 mm x 5.3 mm |
| Camera pixels | 3 MP |
| Resolution | 2048 x 1536 pixels |
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