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TS300

MPI TS150 is a 300 mm Manual Probe System for accurate and reliable DC/CV and RF measurements.

Overview

MPI TS150 is a 300 mm Manual Probe System for accurate and reliable DC/CV and RF measurements.

Chuck XY Stage (Standard)
Total travel range	240 x 315 mm (9.4 x 12.4 in)
Fine-travel range	25 x 25 mm fine micrometer control
Fine-travel resolution	< 1.0 µm (0.04 mils) @ 500 µm/rev
Planarity	< 10 µm
Theta travel (standard)	360°
Theta travel (fine)	± 5.0°
Theta resolution	7.5 x 10^-3 gradient
Movement	Puck controlled air bearing stage
Manual Microscope Stage (Air Bearing)
Movement range	25 x 25 mm (1 x 1 in)
Resolution	N/A
Scope lift	Manual, tilt-back
Movement	Air bearing control, fixed by vacuum
Manual Microscope Stage (Linear)
Movement range	50 x 50 mm (2 x 2 in) or 80 x 80 mm (3.15 x 3.15 in)
Resolution	< 5 µm (0.2 mils)
Scope lift	Manual, tilt-back or vertical (depending on microscope type)
Movement	Independently controlled X and Y movement with locking screws

Our friendly team is here to help.

info@trokutsolutions.com

Our friendly team is here to help.

(+91) (022) 40124404