Overview
MPI TS3000-HP is a 300 mm Automated Probe for accurate and reliable High Power measurements.
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TS3000-HP
MPI TS3000-HP is a 300 mm Automated Probe for accurate and reliable High Power measurements.
Key Features
Dedicated designed for High Voltage and High Current application
- On wafer high power device measurement up to 10 kV/600 A.
- Gold plated chuck surface for minimum contact resistance and vacuum holes optimized for thin wafer handling down to 50 µm.
- Taiko wafer chuck option.
- Dedicated high voltage and high current probes.
- Anti-arcing solutions.
MPI ShielDEnvironment™ for Accurate Measurements
- Designed for Advanced EMI / RFI / Light-Tight Shielding.
- fA low-leakage capabilities.
- Ready for temperature range -60 °C to 300 °C.
Ergonomic Design and Safety
- Easy wafer or single DUT loading from the front.
- Regulatory approved safety interlocked light curtain to protect users.
- Integrated active vibration isolation.
- Completely integrated prober control for faster, safer and convenient system and test operation.
- The Safety Test Management (STM™) option to load/ unload wafers at any chuck temperatures and auto dew point control.
Specification
| Chuck XY Stage (Programmable | |
|---|---|
| Travel range | 310 mm x 335 mm (12.2 x 13.19 in) |
| Resolution | 0.5 µm |
| Accuracy | < 2.0 µm (0.08 mils) |
| XY stage drive | Closed-loop high precision stepper motors |
| Speed | 5-Speed XY chuck stage speed movement |
| Max. movement speed | 50 mm / sec |
| Chuck Z Stage (Programmable) | |
| Travel range | 30 mm (1.18 in) |
| Resolution | 0.2 µm |
| Accuracy | < 2 µm |
| Repeatability | < 1 µm |
| Z stage drive | Closed-loop high precision stepper motor |
| Guider | Precision ball bearings |
| Chuck Theta Stage (Programmable) | |
| Travel range | ±5.0° |
| Resolution | 0.0001° (0.24 µm @ 300 mm edge) |
| Accuracy | < 2.0 µm (measured at the edge of the 300 mm chuck) |
| Repeatability | < 1.0 µm |
| Theta stage drive | High resolution stepper motor with linear encoder feedback system |
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