Overview
MPI TS3000-SE is a 300 mm Automated Probe System for accurate and reliable IV, CV, pulsed-IV, 1/f and RF Measurements
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TS3000-SE
MPI TS3000-SE is a 300 mm Automated Probe System for accurate and reliable IV, CV, pulsed-IV, 1/f and RF Measurements.
Key Features
Designed for Variety of On-Wafer Applications
- Device Modeling – DC-IV, DC-CV, Pulse-IV, ESD, 1/f.
- RF and mmW – RF Setup from 26 GHz to 110 GHz & beyond.
- Wafer Level Reliability – for accurate stress- and measure conditions.
- Drivers for leading test executive software suits.
MPI ShielDEnvironment™ for Accurate Measurements
- Advanced EMI / RFI / Light-tight Shielding for best 1/f noise test results.
- Ultra-low noise IV measurements down to fA level.
- Programmable microscope movements for test automation and ease of use.
- Wide temperature range -60 °C to 300 °C with unique configuration flexibility.
Ergonomic Design and Options
- Easy wafer or single DUT loading from the front.
- Integrated active vibration isolation.
- Completely integrated prober control for faster, safer and convenient system and test operation.
- The Safety Test Management (STM™) with automated dew point control.
- Reduced footprint due to smart integration of the chiller.
- Instrument shelf option for shorter RF cables providing the highest measurement dynamic.
Specification
| Chuck XY Stage (Programmable) | |
|---|---|
| Travel range | 310 mm x 335 mm (12.2 x 13.19 in) |
| Resolution | 0.5 µm |
| Accuracy | < 2.0 µm (0.08 mils) |
| Repeatability | < 1.0 µm |
| XY stage drive | Closed-loop high precision stepper motors |
| Speed* | Slowest: 10 µm/sec | Fastest: 50 mm/sec |
| Chuck Z Stage (Programmable) | |
| Travel range | 30 mm (1.18 in) |
| Resolution | 0.2 µm |
| Accuracy | < 2.0 µm |
| Repeatability | < 1.0 µm |
| Z stage drive | Closed-loop high precision stepper motor |
| Speed* | Slowest: 10 µm/sec | Fastest: 20 mm/sec |
| Guider | Precision ball bearings |
| Chuck Theta Stage (Programmable | |
| Travel range | ±5.0° |
| Resolution | 0.0001° (0.24 µm @ 300 mm edge) |
| Accuracy | < 2.0 µm (measured at the edge of the 300 mm chuck) |
| Repeatability | < 1.0 µm |
| Theta stage drive | High resolution stepper motor with linear encoder feedback system |
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